Clark,
I researched that Yahoo poster's posting history on the Cymer board a long time ago in an effort to determine credibility. The factual errors contained in many of his early posts did not lead me to believe he is credible, for instance, his claims of working with a Cymer 5400 laser and a Nikon EXX scanner, two products which have never existed to the best of my knowledge.
messages.yahoo.com@m2.yahoo.com
messages.yahoo.com@m2.yahoo.com
canon and nikon each own 25% of Cymer
messages.yahoo.com@m2.yahoo.com
messages.yahoo.com@m2.yahoo.com
our latest Nikon ( sucks )scanner needs a new laser chamber ( we just accepted it 2 weeks ago )
messages.yahoo.com@m2.yahoo.com
messages.yahoo.com@m2.yahoo.com
Anyway, if you are interested in the lifetimes of Cymer's latest technology modules, I refer you to the paper Production-Ready 2000KHz KrF Excimer Laser for DUV Lithography. It's my understanding that the 6000 series shares many key modules with 5010, and some these developments were also available as part of the 5000 series upgrade program. Also, in the 6000 paper, they quote MTBF on chamber bearings as being 3400 hours, or 141 days, so if there was in fact a problem, it seems to have been resolved.
cymer.com
cymer.com
While you're at that articles page, check out the other papers, there's some good info there.
Bob |
