Samsung Orders Multiple SACVD Systems from Applied Materials
More Than 500 Applied Materials' SACVD Systems Installed at Customer Sites Worldwide
[I missed this ... --Duker]
SANTA CLARA, Calif.--(BUSINESS WIRE)--April 6, 1999--Applied Materials, Inc., the leading global supplier of chemical vapor deposition (CVD) systems, has received a multiple-system order for its Giga-Fill(TM) Sub-Atmospheric SACVD(TM) Centura® from Samsung Electronics Co. Samsung will use the systems in a new fab expansion to deposit undoped silicate glass (USG) and borophosphosilicate glass (BPSG) dielectric films for shallow trench isolation (STI) and premetal dielectric (PMD) gap-fill applications.
''Applied Materials is committed to providing Samsung with the support it needs in meeting its fab requirements,'' said Dr. Farhad Moghadam, vice president and general manager of the Applied Materials' Dielectric Deposition Products Division. ''Our SACVD technology has played a key role in enabling the semiconductor industry to move into deep submicron geometries. These systems are also known for their robust operation at elevated temperatures, high uptime with long runs between chamber cleans, and excellent film uniformity and quality. We are very pleased that customers like Samsung have recognized Giga-Fill SACVD as a highly production-worthy technology.''
Applied Materials has an installed base of more than 500 SACVD systems at customer sites worldwide, many of which are being used for advanced STI, PMD, and intermetal dielectric (IMD) applications. The company's leading SACVD technology is the Giga-Fill SACVD Centura. This is the only TEOS/Ozone system with extendibility down to sub-0.18 micron generations to demonstrate greater than 10,000 mean wafers between cleans (MWBC) and to consistently operate with uptimes greater than 90 percent.
The market for atmospheric pressure and sub-atmospheric pressure CVD (APCVD and SACVD) equipment was estimated by market researcher Dataquest at $429 million in 1998, with growth projected to $748 million by 2003. Dataquest estimated the market for all dielectric CVD systems at $1,236 million in 1998, growing to $2,204 million by 2003. Applied Materials' SACVD systems are currently being used by all of the top 25 semiconductor manufacturers worldwide for STI, PMD and intermetal dielectric applications.
Applied Materials, Inc. is a Fortune 500 global growth company and the world's largest supplier of wafer fabrication systems and services to the global semiconductor industry. Applied Materials is traded on the Nasdaq National Market System under the symbol ''AMAT.'' Applied Materials' web site is www.appliedmaterials.com. |
