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Politics : Formerly About Applied Materials

AMAT 230.17

-1.4%

Nov 7 9:30 AM EST

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To: Rusty Johnson who wrote (29437)	4/8/1999 9:17:00 PM
From: Katherine Derbyshire	Read Replies (2) of 70976

In my opinion, only a technically naive rookie with no clue about either the semiconductor industry or optical lithography would describe EUV as "extending optical lithography's reign." See news.semiconductoronline.com for a more detailed discussion of why EUV is radically different. Among other technical inaccuracies, the TRW laser does not directly generate EUV light. It heats up a metal source, which then emits EUV photons. The difference matters because "laser-produced plasma" is far less efficient than using a laser directly. Harrumph! (Sorry to be so grumpy. I just wish "reporter" weren't such a broad term sometimes.) Katherine

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