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FSI International Receives Order for ZETA Surface Conditioning
System
Business Wire - April 08, 1999 06:59
MINNEAPOLIS--(BUSINESS WIRE)--April 8, 1999--FSI International, Inc. (Nasdaq: FSII)
announced today it has received an order for its new ZETA(TM) Surface Conditioning System. The customer, a key industry semiconductor manufacturer, will use the tool in support of its copper
interconnect process. The system is expected to ship in the fourth quarter of fiscal 1999.
The customer, who has a global installed base of MERCURY(R) Surface Conditioning Systems, selected the automated ZETA System to enhance productivity in its SMIF-based fab. "This customer selects FSI
spray tools because they provide better flexibility to run different recipes and allow more efficient and environmentally safe use of chemicals and DI water," says Dale Courtney, FSI president of the Surface Conditioning Division.
FSI's ZETA Surface Conditioning System is a fully automated spray batch processor that performs a wide variety of submicron cleaning, stripping and etching applications. It is designed to meet all factory
automation requirements for both 200- and 300-mm wafer technology.
FSI Surface Conditioning Division is a leader in producing automated surface conditioning equipment for processing silicon wafers. In addition to the ZETA System, the division's products include the
ARIES(R) CyoKinetic Cleaning Systems, which uses inert, frozen gas crystals to clean wafers for defect reduction and yield enhancement; MERCURY(R) Surface Conditioning Systems, which also perform
submicron cleaning, etching and photoresist stripping applications; and EXCALIBUR(R) Vapor HF and Advanced Vapor Cleaning Systems, which perform critical cleaning and specialty etching applications.
The division has design and manufacturing facilities in Chaska, Minn.
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