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To: Bilberry who wrote (21652)	4/11/1999 9:36:00 PM
From: Mani1	Read Replies (1) of 25960

Bilberry From the article "deep UV can't print lines much thinner than 0.15 microns." Nope, lines as thin as 0.07 (may be even 0.06) have been demonstrated using DUV and "phase mask" technique. Currently DUV continues to be the only game in town. My guess is as long as 10 years. After that who know, may be EUV, may be Xray, may be SCALPEL. "JMAR Technologies Inc. in San Diego has just unveiled a file-cabinet-size system that produces 1-nanometer X-rays. Chairman John S. Martinez predicts that X-ray lithography will soon give optical equipment a run for its money." LOL, Mr. Martinez has been talking about this for three years now. Virtually no one important (beside some scientist at IBM) think that Xray (of any form) has any future within the next 10 years. Mani

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