Innovative Hexagonal Cell Platform from SVG Addresses Coat and Develop Process Challenges and Marks Paradigm Shift in Track of the Future
Symmetric Cluster Cell Design Simplifies Resist Processing And Improves Consistency of Results
SAN JOSE, Calif.--(BUSINESS WIRE)--April 14, 1999-- Silicon Valley Group (Nasdaq: SVGI - news)
today announced the development of a breakthrough cell-based cluster platform that optimizes the
movement of wafers during lithography processing. The new platform is a major shift from conventional
track systems, addressing industry-wide challenges in the coating and developing process to achieve the
best critical dimension control.
Based upon a close-packed hexagonal cell structure, the three-axis system design simplifies motion and
control variables to eliminate random system-induced delays. Critical time delay management of wafer
routing ensures consistent processing - within a wafer, from wafer to wafer, and from cassette to
cassette.
''With the accelerated industry roadmaps outlined by International SEMATECH and the
Semiconductor Industry Association (SIA), the industry can no longer afford to think linearly,'' said
Boris Lipkin, president of SVG's Track Systems division. ''More stringent lithography production
requirements are driving customers toward tighter critical dimension control. This has created the need
for a platform that can move wafers and consistently schedule process steps,'' noted Lipkin.
By simplifying wafer routing, the platform's symmetrical design plays a critical role in improved
lithography cluster productivity. The system's capability of processing 40-plus wafers simultaneously
matches the throughput demands of the leading stepper/scanners. This platform enables a standard
footprint, the same for both 200 mm and 300 mm configurations, meaning facilities are always located in
the same place for reduced labor and installation costs.
''This breakthrough is the result of internal research and development plus knowledge of best industry
practices. We are very close to commercializing the new platform and pleased to be able to provide
significant productivity improvement for the coat and develop processes,'' commented Lipkin.
SVG chairman and CEO Papken Der Torossian noted, ''The industry knowledge base of our new design
team has resulted in a truly innovative platform design. I am very excited about their accomplishments,
especially in the area of system reliability and system control architecture, which historically are
always challenges.''
Silicon Valley Group (Nasdaq: SVGI - news) is a leading manufacturer of automated wafer processing
equipment for the worldwide semiconductor industry. The company designs, manufactures and markets
technically sophisticated equipment used in the primary stages of semiconductor chip manufacturing. Its
products include photolithography exposure tools; photoresist processing equipment; oxidation, diffusion
and low-pressure chemical vapor deposition processing systems; and precision optical components and
systems. For more information, visit www.svg.com. |
