Coherent, Inc. Subsidiary Receives Follow on
Orders for High Performance Excimer Laser
Systems From SVG Lithography Systems, Inc.
FT. LAUDERDALE, Fla.--(BW HealthWire)--April 15, 1999--Lambda Physik, a majority owned
subsidiary of Coherent, Inc. (Santa Clara, CA)(Nasdaq:COHR - news) today announced multiple orders
for their high performance excimer laser systems from Silicon Valley Group (Nasdaq: SVGI - news). The
orders are for the next generation NovaLine® excimer laser systems operating at 2 kHz pulse rate and
will be delivered in the second calendar quarter of 1999. SVG-Lithography will take delivery of several
A2020 (2kHz ArF) lasers for integration with high throughput production versions of its MICRASCAN
III and MS193 nm systems.
''The advanced performance specifications of these next generation lasers are key to providing high
productivity, leading edge lithographic technology to our customers,'' said Bill Hightower, president
SVG.
NovaLine K2020 is a 30 W (15 mJ/pulse) partially line-narrowed 248 nm (KrF) laser for use with
SVG's catadioptric lens design. The K2020 provides superior pulse stability (+/-0.5%) while delivering
15 mJ/pulse at 2000 Hz. With continued improvements in key modules such as the NovaTube® (5 billion
pulse lifetime) and the NovaPowerSwitch(tm) solid-state switch (lifetime warranty), the K2020 has
reduced the cost per pulse by a factor of two while providing greater throughput, thus enabling a
substantial Cost of Ownership (CoO) improvement.
NovaLine A2020 is a 20 W (10 mJ/pulse) partially line-narrowed 193 nm (ArF) laser designed
specifically for SVG's MICRASCAN 193 nm production systems. Due to careful selection of optical and
laser tube materials, the A2020 is extremely efficient enabling the longest component lifetimes and the
lowest Cost of Ownership available today. High output power, tight pulse stability and low operating
cost contribute positively to the goal of bringing 193 nm lithography into the mainstream production line.
Dr. Dirk Basting, founder and president of Lambda Physik commented, ''We believe we can enable the
semiconductor industry to achieve smaller circuit features through the use of our proprietary technology
combined with our worldwide customer support.''
Lambda Physik is a worldwide manufacturer of high power, pulsed UV and tunable laser sources for
scientific, medical, lithography and other industrial applications.
Silicon Valley Group is a leading manufacturer of automated wafer processing equipment for the
worldwide semiconductor industry.
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Founded in 1966, Coherent, Inc. is a Standard & Poor's SmallCap 600 company and a world leader in the
design and manufacture of lasers and systems for medical, scientific and commercial applications. Please
direct any questions to Peter Schuman, Director of Investor Relations at (408) 764-4174. For more
information about Coherent, visit our Web site at cohr.com for product and financial
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