Formerly About Advanced Micro Devices Message Board

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Politics : Formerly About Advanced Micro Devices

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To: Process Boy who wrote (57606)	5/7/1999 4:14:00 PM
From: Paul Engel	Read Replies (1) of 1572102

PB - Re: "I don't know how you design a fab building for Cu. When you transition to Cu, you move some stuff around, move in some Cu equipment, and start processing." I hope you are joking ! Copper must be prevented from getting any where near the silicon substrates - i.e., in the "front end" of the fab process. It would be best to do the copper metallization/damascene/CMP/etc. in a facility ISOLATED from the front end processing - everything BEFORE the first Contact mask. Paul

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