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To: mauser96 who wrote (82404)6/2/1999 12:17:00 AM
From: Paul Engel  Read Replies (1) of 186894
 
Lucius - Re: "though I would expect that in time there will be improvements in the barrier thickness. "

As line widths decrease for metallization, the barrier thickness becomes a larger fraction of the over all line width - since it has to cover BOTH edges, and the top and bottom.

And DIFFUSION lengths DO NOT SCALE !!!

Paul
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