Speedfam [SFAM] Lovers Unite ! Message Board

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Technology Stocks : Speedfam [SFAM] Lovers Unite !

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To: Rob-Chemist who wrote (3418)	6/2/1999 2:47:00 AM
From: Mr. Sam	Read Replies (1) of 3736

<<How does web-based polishing differ from the belt-type technology being implemented by LRCX? My impression is that they are qualitatively similar in that a slurry is not needed in either case. TIA>> The linear (belt) approach still uses slurry. The slurry is dispensed onto the belt just upstream of the wafer. This approach doesn't waste as much slurry as the rotary technique does, but it is similar from a fundamental point of view. The Obsidian approach can be used with small amounts of slurry, but the vision for it is that all of the abrasive that is needed is fixed to the pad and only an oxidizer is applied to the surface of the pad. In practice, I think that most people are still using a little bit of slurry to achieve the process results they need. Further pad development may change that in the future.

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