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Technology Stocks : Speedfam [SFAM] Lovers Unite !

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To: Kirk © who wrote (3420)6/2/1999 8:00:00 PM
From: Mr. Sam  Read Replies (3) of 3736
 
<<Q: Why is it good to eliminate a slurry? Major cost savings or yield improvements usually drive changes. What are they here? >>

The cost savings are significant. Costs vary widely by application and platform, but slurry can comprise as much as 40% of the cost of ownership for a CMP process.

If, however, these savings are achieved at the cost of even a small yield reduction, then for most technologies, it will not be cost-effective to make the change. The slurry-less development effort is focused on achieving the process results and yield results comparable to the slurry processes. If they can get to that point, then most users will have a compelling case for implementing a slurry-less process.
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