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To: Elmer who wrote (83135)6/9/1999 12:39:00 PM
From: Paul Engel  Read Replies (1) | Respond to of 186894
 
Elmer - Re: "any insight into who the equipment suppliers are in the 300mm "

The usual "suspects", I presume.

Applied Materials, SVGL & Nikon, come to mind. Intel may have a Canon 300 MM Stepper/Scanner that they paid for, initially used at SemaTech.

I'm not sure about IPEC/Speedfam for CMP after their merger.

From a Copper standpoint, that remains to be seen with Novellus, Lam and SemiTool all racing to beat AMAT.

PRIA - from an automation and wafer handling/transport and reticle handling standpoint.

300 mm wafers will literally require some "heavy lifting".

I'm sure I'm missing many others.

Intel's philosophy is to stick with the LARGEST, MAJOR manufacturers.

By the way - with the "exorbitant" cost of 300 MM wafers, I wouldn't be surprised if Intel used their CMP expertise to re-cycle their test wafers - strip and repolish - to keep development costs under control.

Paul