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To: Carl R. who wrote (848)6/9/1999 10:04:00 PM
From: Ian@SI  Read Replies (2) | Respond to of 955
 
I think the discussion was by Katherine Derbyshire on either the CYMI or the AMAT thread.

Essentially, DRAM chips have repetitive patterns and Phase Shift Masks can be made to do the trick.

With logic, there's little or no repetition in the chip and PSM is out to lunch.

Ian.


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