To: Ginko who wrote (22539 ) 7/14/1999 5:44:00 PM From: BillyG Respond to of 25960
SVGL revamps 193-nm tool, looks to sell DUV scanners for non-critical layers A service of Semiconductor Business News, CMP Media Inc. Story posted 9 a.m. EST/6 a.m., PST, 7/14/99 By Jack Robertson SAN FRANCISCO -- SVG Lithography will make its first push into selling its deep-UV scanners for non-critical layer processing, according to a technical presentation at Semicon West here. The firm also admitted that it was revamping its 193-nm argon fluoride tool with a 0.75 numerical aperture (NA) lens after the original Micrascan-193 system using a lens with 0.60 NA was turned down by two development partners. (see July 13 story). Four chip makers -- Intel, Samsung, Hyundai and Motorola -- invested $10 million each with SVGL to develop the initial 193-nm tool. But officials of Samsung and Hyundai told SBN last month that despite their respective investments, they weren't ordering any SVGL Micrascan-193 tools. John Shamaly, vice president of marketing for the parent Silicon Valley Group, of San Jose, said the lithography unit "has been highly successful selling leading-edge step-and-scan systems to make critical layers. However, the most money in lithography is with a greater number of tools sold to process non-critical layers." The SVGL official said that earlier Micrascan-II and Micrascan-III scanners could be used along with leading-edge tools to make all layers on a wafer. "Reticles have the same field-of-view size for both the critical layer and non-critical layer tools. This is a great advantage for logic-chip makers, over trying to mix-and-match different field-of-view reticles for critical layer scanners and step-and-repeat non-critical-layer steppers." Shamaly said some chip makers may simply decide to use older Micrascan-II systems already installed to make non-critical layers. Sources said Intel is doing this now, although the SVGL official referred all questions on Intel operations to the microprocessor maker itself. He said SVGL, of Wilton, Conn., is now hoping to sell new Micrascan-II scanners, which the company still produces, to customers for replacement of steppers used for non-critical layers. Meanwhile, Shamaly said SVGL also was restructuring its next generation 193-nm tool in the wake of the two partners' decision not to purchase the system