To: Walter Morton who wrote (193 ) 7/27/1999 3:40:00 PM From: DSPetry Read Replies (1) | Respond to of 338
Eaton Semiconductor Receives Multimillion-Dollar Order From Samsung; Korean Chipmaker to Install System in Kiheung Facility BEVERLY, Mass., Jul 27, 1999 (BUSINESS WIRE via COMTEX) -- EatonSemiconductor Equipment Operations today announced that it has received a major, multiple system order from Samsung for both ion implantation and photoresist dry-strip systems. The multimillion-dollar order includes both FusionGemini dual-chamber ashers and GSD/HE series high energy ion implanters. A comprehensive after-sales support package is also included in the sale. The systems will be installed at Samsung's dynamic random access memory (DRAM) fab located in Kiheung, Korea. "This order will supplement Samsung's existing installed base of production-proven FusionGemini ashers that provide the benefits of high ash rate and damage free resist stripping," said Mary Puma, vice president of Eaton Semiconductor. "We are pleased to have the opportunity to extend our relationship with Samsung to include the GSD/HE high energy implant product line." Eaton Semiconductor's FusionGemini ashers are dry photoresist strip tools with bulk strip and residue removal capabilities. Eaton Semiconductor's ashers provide the highest ash rates, lowest damage and widest process window of any asher available on the market today. The product line also features radiant heating technology that enables multi-temperature control, uniform wafer heating, maximum processing flexibility and reduced process times. Designed without a thermal chuck in the reactor chamber, the FusionGemini ashers deliver low particle contamination. With an extremely high uptime, the FusionGemini ashers have demonstrated high productivity, high reliability and low cost of ownership (COO) with a cost-effective, smallfootprint. Eaton Semiconductor's GSD/HE series is the industry's first production-class high energy ion implantation product line, designed to provide exceptional productivity and the lowest COO for the production of retrograde well, triple well and buried layer implants. The GSD/HE series offers maximum system utilization through the ability to perform medium current implants as part of routine production operations (e.g., threshold voltage adjust implants). The tools provide the broadest range of ion implantation capability, from 10keV to 3MeV, as well as superior process control by offering unmatched beam purity, real-time dose control and a dedicated disk cooling system. The GSD/HE series dominates the market with greater than 80 percent market share. About Eaton Semiconductor Equipment Operations Eaton Semiconductor Equipment Operations, headquartered in Beverly, is a unit of Eaton Corporation (NYSE: ETN). Eaton Semiconductor provides innovative, high-productivity manufacturing solutions for the semiconductor industry. Eaton Semiconductor is dedicated to the design and manufacture of high current, medium current and high energy ion implantation equipment; fast ramp vertical furnaces and rapid thermal processing systems; photostabilization and photoresist stripping equipment; and implant systems specifically designed for the next generation of flat panel manufacturing. Eaton Semiconductor has manufacturing facilities in Beverly; Peabody, Mass.; Rockville, Md. and Kyunggi-do, Korea as well as in Tokyo, Japan through its joint venture with Sumitomo Heavy Industries. The Internet address for Eaton Semiconductor is: www.semiconductor.eaton.com About Eaton Corporation Eaton Corporation is a global manufacturer of highly engineered products that serve industrial, vehicle, construction, commercial, aerospace and semiconductor markets. Principal products include hydraulic products and fluid connectors, electrical power distribution and control equipment, truck drivetrain systems, engine components, ion implanters and a wide variety of controls. Headquartered in Cleveland, the company has 65,000 employees and 215 manufacturing sites in 25 countries around the world. Eaton's sales for 1998 were $6.6 billion. On April 9, 1999, Eaton acquired Aeroquip-Vickers, Inc., which had sales of $2.1 billion in 1998. The Internet address for Eaton is: eaton.com Copyright (C) 1999 Business Wire. All rights reserved. -0- CONTACT: Eaton Semiconductor Equipment Operations Maureen Hart, 978/232-4000 mhart@bev.etn.com or The Loomis Group Jennifer Anselmo, 415/882-9494 anselmo@loomisgroup.comquotes.freerealtime.com