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To: Ian@SI who wrote (2185)7/22/1999 8:53:00 AM
From: Katherine Derbyshire  Read Replies (1) | Respond to of 2946
 
Higher NA allows them to extend the resolution range of the tool. It's needed because the linewidth entry point for 193 nm has shifted downward.

Re: the current design, work they've done on wafer handling, stage movement, and so forth will still be useful. And designing a high NA 193 lens when you already have a low NA 193 lens is probably easier than designing the first 193 nm lens.

Katherine