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Politics : Formerly About Advanced Micro Devices -- Ignore unavailable to you. Want to Upgrade?

To: Dan3 who wrote (72462)	9/20/1999 3:06:00 PM
From: Yousef	Read Replies (1) \| Respond to of 1572453

Dan3, Re: "Are there any problems associated with polishing the copper surface?" Yes ... The slurries and pads necessary to polish Copper need to be developed. Also, the technical issue of "dishing" needs to be adequately solved. Dishing is where as one polishes the copper, the large copper trenches polish faster than the narrow ones. Thus the larger trenches sometimes will be polished below the ILD surface. Another issue is with cleaning the slurry and residual copper off after polishing. This could have been what led to AMD's problems. I have always said on this thread that Motorolo had not solved all of these issues and thus the AMD process in Dresden would be late. Make It So, Yousef