To: Mark Ivan who wrote (2418 ) 9/21/1999 5:54:00 PM From: All Mtn Ski Read Replies (1) | Respond to of 3069
ASML moves in: ASML launches litho family for thin-film heads Semiconductor Business News (09/21/99, 11:09:58 AM EDT) VELDHOVEN, The Netherlands--ASM Lithography here today announced its entry into the growing market for exposure tools used to make thin-film heads for disk drives. ASML joins other major wafer stepper suppliers to augment their sales to semiconductor fabs by offering versions of their tools for thin-film heads. ASML said the global market for thin-film heads is expected to grow nearly 75% from 913 million units in 1998 to more than 1.6 billion in 2001, based on a forecast from Peripheral Research Inc. The Dutch lithography supplier said current and future generations of disk drive heads will require exposure tools capable of printing feature sizes less than a half micron wide. To serve this market opportunity, ASML introduced a new series of lithography systems, which the company said was designed for patterning advanced thin-film heads. The SA 5500/TFH100 i-line stepper and SA 5500/TFH300 deep-UV tool are based on technology used by ASML to serve semiconductor fabs. ASML said its new stepper series has the resolution capability necessary to push thin-film head areal densities over 10 gigabytes per square inch. The tools have been designed for a high degree of colinearity and lens distortion performance, allowing imaging fields to be "stitched" together side by side for elongatedrowbars needed in today's advanced disk drives, said ASML. director for ASML. "ASML has taken its proven lithography experience and used it to design systems to meet the specific needs of thin-film head processing, including superior cost-effectiveness and the flexibility to accommodate different substrate shapes," he asserted. "Despite the demands of thin-film head lithography, manufacturers have typically had to adapt lithography tools designed for other applications," said Eduard Hoeberichts, vice president and managing semibiznews.com