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Politics : Formerly About Advanced Micro Devices -- Ignore unavailable to you. Want to Upgrade?

To: Bill Jackson who wrote (72760)9/22/1999 6:01:00 PM
From: Goutam  Read Replies (1) | Respond to of 1572232
 
BIll, Re: "Yousef, Since they use copper is the damascene process because it is more conductive than aliminium, can they similarly use gold in damascene?"

Hope this provides the answer to your question (from Yahoo AMD thread - messages.yahoo.com )

Gold is not typically used in Si semiconductors as it diffuses rapidly in Si. This rapid diffusion gets to the transistor and
kills it.

Also, contacts are usually filled using a Chemical Vapor Deposition scheme. Gold is a noble metal meaning it would be
difficult to incorporate into a liquid/gas precursor (much like Cu) and would be difficult to CVD. Physical Vapor
Deposition does a marginal job of filling deep contacts.

Goutama



To: Bill Jackson who wrote (72760)9/22/1999 6:45:00 PM
From: RDM  Read Replies (3) | Respond to of 1572232
 
IF gold is good why not silver. Silver is even more than 50% more conductive than gold.


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