To: Ian@SI who wrote (23178 ) 10/5/1999 10:44:00 PM From: cluka Respond to of 25960
Ian, FWIW from ML NEWS DUV Laser — Komatsu Taking Share Richard Kaye, ML Tokyo Komatsu's domestic market share has grown from 7% in Q1 98 to 66% Q1 99. Toshiba (6502) uses Komatsu as its first vendor, and recently bought the 2kHz laser, for a 204nm Nikon Scanner. Komatsu has shipped three units to Taiwan, one to Samsung, and expects to make its first shipment to ASML next summer. Komatsu's prices are in line with Cymer's at JPY40-50m ($370-470k). Komatsu expects next generation 193nm ArF (argon fluoride) lasers to be relatively slow to penetrate the market because of their high relative maintenance (3x) and capital cost (1.5x) compared to today's 248nm KrF (krytpon fluoride) lasers. Ushio has delayed its entry to the DUV laser market for some time — we are unlikely to see them before ArF arrives. Tom Diffely/Mark FitzGerald ML San Francisco spoke to market leader Cymer, who agree with Komatsu's estimate of 15% ArF penetration by 2002. ML comment: For ASML the entrance of Komatsu does not appear to have caused any price erosion for this key component. ASML's main DUV product sells for EUR7.5m ($7.9m) so the laser represents about 6% of the selling price. We suspect that any future price declines would be passed on to the customer. Lambda Physik, the German based subsidiary of Coherent Inc, is also entering the DUV laser market — it has a unit installed with an ASML machine at Micron, and is having its ArF unit assessed by Sematech. We expect this company to hit the market with the transition to 193nm. When we visited Lambda they were confident that their design had significantly lower maintenance costs than competitive offerings.