SI
SI
discoversearch

We've detected that you're using an ad content blocking browser plug-in or feature. Ads provide a critical source of revenue to the continued operation of Silicon Investor.  We ask that you disable ad blocking while on Silicon Investor in the best interests of our community.  If you are not using an ad blocker but are still receiving this message, make sure your browser's tracking protection is set to the 'standard' level.
Politics : Formerly About Advanced Micro Devices -- Ignore unavailable to you. Want to Upgrade?

To: THE WATSONYOUTH who wrote (75845)10/18/1999 4:08:00 AM
From: Process Boy  Respond to of 1571405
 
WATSONYOUTH - <This is a DAMASCENE process analogous to Intel's tungsten contact hole process (the tungsten is polished - not etched)>

Oh! That is not as bleak. I had assumed it was an etchback (you are saying it's polished back, aren't you?). Thanks for the enlightenment. Still, that's a lot of added steps in that section of the process that I do not have the pleasure of addressing. :-).

PB



To: THE WATSONYOUTH who wrote (75845)10/18/1999 10:50:00 AM
From: Charles R  Respond to of 1571405
 
TWY,

<I'm not sure either of you are familiar with how AMD is practicing the local interconnect. I would guess AMD uses a doped glass dielectric (as Intel does at the contact level)
with a silicon nitride etch stop and tungsten fill after appropriate liner. This is a DAMASCENE process analogous to Intel's tungsten contact hole process (the tungsten is polished - not etched) >

Could you repeat that in simpler terms specially with explanation of what "DAMASCENE" is all about and its impact on manufacturability compared to what Paul was saying?

Thanks
Chuck

P.S.: Other process experts - feel free to chip in.



To: THE WATSONYOUTH who wrote (75845)10/18/1999 2:05:00 PM
From: Paul Engel  Read Replies (1) | Respond to of 1571405
 
TWY - Re: "I'm not sure either of you are familiar with how AMD is practicing the local interconnect. I would guess AMD uses a doped glass dielectric (as Intel does at the contact level) "

Since YOU ARE GUESSING, you are obviously "not sure ... with how AMD is practicing the local interconnect".

Why do you assume your guesses are better than mine - or PB's ?

Paul



To: THE WATSONYOUTH who wrote (75845)10/18/1999 2:09:00 PM
From: Paul Engel  Read Replies (3) | Respond to of 1571405
 
TWY - Re: "This is a DAMASCENE process analogous to Intel's tungsten contact hole process (the tungsten is polished - not etched) "

If AMD used a DAMASCENE process for their local interconnect layer, they would lose much of the density advantage of this technique with the ADDITION of even further process complexity.

Paul


HomeMailHotSubjectMarksPeopleMarksKeepersSettings
Terms Of UseContact UsCopyright/IP PolicyPrivacy PolicyAbout UsFAQAdvertise on SI
© 2025 Knight Sac Media.  Data provided by Twelve Data, Alpha Vantage, and CityFALCON News