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Politics : Formerly About Advanced Micro Devices -- Ignore unavailable to you. Want to Upgrade?

To: Paul Engel who wrote (80237)	11/17/1999 3:28:00 AM
From: Mani1	Respond to of 1571911

Paul Re <<disposable 0.18 micron wafer stepper/scanners that were only used for 3 months of production - to be obsoleted with a whole new array of 0.15 micron stepper/scanners!>> The move from 0.25 to 0.18 did not require new steppers. The move from 0.35 to 0.25 of course did as it moved to DUV. Steppers made by all the three main manufacturers (ASML, Canon, Nikon) for 0.25, also works for 0.18 as the light source is the same. Of course a new mask as well as some changes to the optics is needed. Mani