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To: visionthing who wrote (35645)	12/8/1999 10:17:00 PM
From: Don Green	Respond to of 93625

O.T. Toshiba, Fujitsu Aim For 1-Gigabit DRAM Using KrF Technology TOKYO (Nikkei)--Toshiba Corp. (6502) and Fujitsu Ltd. (6702) have set their sights on jointly developing technology to produce 1-gigabit DRAM chips using KrF (krypton fluoride) excimer laser steppers and 0.13-micron process technology. Developing technology to produce 1G chips using existing KrF steppers instead of next-generation ArF (argon fluoride) equipment will enable Toshiba and Fujitsu to accelerate the start-up of next-generation DRAM production lines, and avoid the added cost of purchasing and installing new equipment. To this end, the joint research team has determined the conditions necessary to extend KrF technology down to 0.13-micron design rules, and has developed software for use in the production of photomasks that first simulates the printing of circuits on a wafer to detect and correct for errors before the actual masks are produced. Toshiba and Fujitsu formed an alliance on 1G DRAM research and development in December 1998, and are aiming to commercialize a 1G chip by 2003 at the latest. (The Nikkei Industrial Daily Thursday edition)