To: Mark Ivan who wrote (2618 ) 1/10/2000 6:56:00 PM From: All Mtn Ski Read Replies (1) | Respond to of 3069
Veeco Receives $4.7 Million in Orders for Automated Semiconductor Tools PLAINVIEW, N.Y.--(BUSINESS WIRE)--Jan. 10, 2000--Veeco Instruments Inc. (NASDAQ:VECO - news) today announced receipt of $4.7 million in multiple unit orders for its semiconductor production metrology tools, the Dimension(TM) 9000TR atomic force microscope and the recently introduced chemical-mechanical polishing (CMP) metrology tool, the Dimension Vx Atomic Force Profiler(TM) (AFP). The orders, which were received in the fourth quarter of 1999, were from leading semiconductor manufacturers in Europe, the U.S. and Asia-Pacific. These metrology tools are designed and manufactured by Veeco Metrology Group's Santa Barbara operation. Don Kania, Ph.D., V.P. and G.M. of Veeco Metrology Santa Barbara, said, ''We are pleased that leading international semiconductor manufacturers have recognized the productivity and cost savings of our production tools. They are rapidly making the Dimension 9000TR their tool of choice for depth measurements of 0.13 micron and smaller structures, and are likewise choosing our Vx tools for process control in the CMP market.'' The Dimension 9000TR offers gauge-capable measurements of STI, RC1, RC2, RR and other trench structures in logic and memory manufacturing. It fully automates on-line process monitoring with self-calibration, automatic tip evaluation/replacement, wafer handling, pattern recognition, and recipe-driven automated measurement sequences and data analysis. The Dimension Vx Atomic Force Profiler combines true AFM resolution with the long-scanning (up to 100mm) capabilities of a stylus profiler. The Vx AFP is specifically designed for non-destructive measurement of dishing, erosion, and recess for line widths of 0.13 microns and below. Both tools are available in 200mm and 300mm versions.