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To: Curlton Latts who wrote (24049)	1/21/2000 10:25:00 AM
From: BillyG	Respond to of 25960

Lambda Physik's new laser tube designed for fluorine lasers operating at 157-nm semibiznews.com Semiconductor Business News (01/20/00, 03:17:45 PM EDT) FORT LAUDERDALE, Fla. -- Lambda Physik here has introduced a new laser tube specifically designed for fluorine (F2) laser operation at 157 nm. The DuraTube is based on the company's NovaTube technology, a metal/ceramic design that virtually eliminates component corrosion and gascontamination, according to the company. The DuraTube is optimized for gas circulation geometry and components, increasing gas lifetime for F2 operation. For example, a gas lifetime for the LPF laser has been measured in energy constant mode at more than 20 million pulses, Lambda Physik claimed. Lambda Physik said this breakthrough in F2 laser technology offers the highest commercially available gas lifetime and reliability without cryogenic gas purifying. All Lambda Physik F2 lasers, including LPF, OPTex, NovaLine F600 and NovaLine 1000 series, are equipped with the new DuraTube. The DuraTube is assembled with special resonator mirror fittings (except OPTex) for easy mirror exchange in combination with a highly isolated beam path. A VUV adapter, for complete isolation of the beam path and an energy monitor, is standard on all LPF and NovaLine F2 lasers. The increase in gas lifetime, combined with energy stabilization, are significant advantages for F2 laser processing at 157 nm, which requires maximum performance, reliability and efficiency. Lambda Physik's F2 lasers are targeted at optics testing or deep-UV lithography at 157 nm. The optimized DuraTube performance results a significantly longer uptime for the laser system, and therefore in lower running costs for the user.