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To: Ritz who wrote (24170)2/3/2000 12:59:00 AM
From: FJB  Read Replies (1) | Respond to of 25960
 
Ritz, Intel does use DUV lithography for critical layers. You can read about it here. developer.intel.com This was already on their P856 process. I would expect, P858(Intel's current leading edge process) to have even more DUV layers.

Bob