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To: Ritz who wrote (24175)2/3/2000 2:15:00 AM
From: FJB  Read Replies (1) | Respond to of 25960
 
Ritz, I-line, 365nm, and Hg lamp are essentially synonymous terms. SVGL markets it as QML, because the tool can resolve 0.25 features and it sounds nicer. Using phase shift masks can get you down to 0.18/0.175 with i-line scanners. Intel's P858(0.18) process has printed gate lengths of 130nm. In simplest terms, they would not be able to execute their P858 process without the use of DUV tools.

Bob


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