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To: Donald Kirchner who wrote (455)	2/7/2000 1:32:00 PM
From: Paul Lee	Read Replies (1) \| Respond to of 677

nice win A T M I's EcoSys Unit Receives Multiple Fab-Wide Orders; Multi-Million Dollar Orders for More than 80 EcoSys Environmental Systems DANBURY, CT. and SAN JOSE, Calif.--(BUSINESS WIRE)--Feb. 7, 2000--A T M I, Inc. (Nasdaq: ATMI), today announced its EcoSys environmental solutions business received two multi-million dollar orders for complete semiconductor fabrication plant abatement equipment and service. EcoSys is providing entire turnkey environmental solutions with service, and monitoring capabilities. A T M I is also supplying its NOWPak(R) high-purity delivery systems and selected thin film materials and technology. One order, from flat panel display manufacturer Lucky Goldstar-Philips highlights the abatement capabilities of EcoSys's CDO(TM) scrubber products, an industry-leading gas treatment solution for CVD (chemical vapor deposition) processes. Initial shipments are underway, and are to continue through the first quarter of 2000. The other order, from semiconductor foundry Chartered Semiconductor, specifies the full-range of EcoSys's environmental solutions -- the CDO for CVD products, plus Novapure dry scrubbers, Vector wet scrubbers, and Guardian thermal scrubbers -- with on-site service and support. The first products are being installed. As a select provider to Chartered, EcoSys is strategically situated for the possibility of additional environmental equipment orders as wafer production increases. James Burns, EcoSys President, said, "We're very encouraged to see EcoSys's full fab business ramping up again, reflecting improved business conditions throughout the semiconductor industry. These orders highlight EcoSys's successful integration of the former Delatech's product lines into our best-of-breed suite of environmental solutions for semiconductor fabrication plants. We see these orders as stepping stones into further market penetration at these, and other, EcoSys customers." Peter Kirlin, Executive Vice-President of A T M I Technologies, said, "This is one of the first of what we believe will be many announcements spotlighting A T M I's ability to supply, deliver, sense, abate, and manage the materials life cycle in chip production. Our customers are seeing the strength and wisdom of A T M I's combined product line offerings as a "one-stop" specialty materials expert for our customers." EcoSys, an A T M I company, is the world's largest supplier of point-of-use semiconductor environmental, health and safety equipment and services. A T M I Materials provides materials that are used in the semiconductor manufacturing process, and the packaging and systems that are used to deliver them. A T M I Technologies provides products that sense and environmentally control these materials, while also providing manufacturing services to those end users who do not wish to perform certain thin film manufacturing processes in-house.