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To: Katherine Derbyshire who wrote (1157)2/11/2000 7:18:00 PM
From: Qualified Opinion  Read Replies (1) | Respond to of 1305
 
Katherine, it seems that EUV is leading over X-Ray and Scalpel

I didn't mean that X-Ray would follow EUV. I am keeping an open mind towards X-Ray since IBM is interested in it.

If Scalpel's throughput remains low while fab. overhead including personnel expenses increases, EUV may be the standard.

I will look for the trade association articles and get back to you.

Rob