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To: BillyG who wrote (24670)	4/11/2000 10:42:00 AM
From: BillyG	Read Replies (1) \| Respond to of 25960

Infineon selects 193nm Canon system............ semibiznews.com Infineon picks Canon's 193-nm scanners for 300-mm fab, DRAMs with 0.1-micron features Semiconductor Business News (04/11/00, 10:21:50 AM EDT) AMSTELVEEN, The Netherlands--Canon Inc.'s European Semiconductor Equipment Division today said it will ship the company's first production-ready 193-nanometer step-and-scan lithography tools to Infineon Technologies AG for fabrication of next-generation DRAMs on 300-mm wafers with 0.10-micron design rules. The initial order calls for Canon to ship several 300-mm argon-fluoride (ArF) scanners to Infineon's Dresden Module 2 fab, said Masami Aou, senior general manager of Canon Europa NV's Semiconductor Equipment Division here. Infineon's Dresden fab, under a 300-mm joint venture with Motorola Inc., has already reached high-yields in production of 64-megabit DRAMs, using 248-nm scanners and 12-inch wafers. Munich-based Infineon plans to invest $1 billion to process 300-mm (12-inch) wafers in Dresden (see March 31 story). Infineon plans to move aggressively into DRAM production using 0.1-micron features and deep-trench exposure characteristics, which requires 193-nm exposure tools, said Johann Harter, senior vice president of frontend manufacturing at the Munich company. Infineon selected the Canon 300-mm scanner after evaluating tools for lens system quality and overlay performance, which were decisive factors, according to Harter. No timetable was given for the 0.10-micron production of memories. Canon said its ArF scanner are based on its 5000 Series scanning platform, which is suitable for either 200- or 300-mm wafer production. The 193-nm scanner uses a 4X reduction lens for single exposures over a 26-by-33 mm field size. Its reduction projection lens system incorporates high-purity calcium fluoride elements and aspherical surfaces for high-contrast imaging and extremely low distortion, said the Japanese lithography supplier.