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To: Paul Lee who wrote (536)6/1/2000 1:37:00 PM
From: kinkblot  Read Replies (1) | Respond to of 677
 
Low-k Dielectrics: Will Spin-On or CVD Prevail?

semiconductor.net

Fairly detailed review article in this months's Semiconductor International, June 2000. Also, a related article by the same author, "Solving the Integration Challenges of Low-k Dielectrics," is cited in the References and linked.



To: Paul Lee who wrote (536)6/4/2000 10:54:00 PM
From: Donald Kirchner  Respond to of 677
 
Mentioned on another thread:

Message 13783964