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To: chic_hearne who wrote (4503)	8/11/2000 2:21:42 AM
From: Paul Engel	Read Replies (1) \| Respond to of 275872

Re: "They are doing this on Al?" Nope - 6 layers of Copper. Re: "At .13um, that's where I hear of problems coming when looking at Al vs. Cu. Do think you can get the same yields on Al as Cu? " I think so - but it will take time. Yields are already pretty good, but not yet up to Aluminum standards. They will get closer as time - and experience - goes by. However, you have to remember - Intel has been doing CMP multi-layer aluminum, for "almost" as long as IBM.