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To: TimF who wrote (107610)8/15/2000 4:21:03 PM
From: semiconeng  Respond to of 186894
 
What exactly is a dual damascene process anyway?

Tim


The Dual-Damascene process, is the Copper Metal Interconnect Process that most chip makers are using. According to this article, it's the same process IBM and Motorola are using. Since AMD got their copper process from Moto, it's most likely the same Cu Process their using. here's an article on it:

semiconductor.net

The main problem with Cu, as I understand it, is isolating the "Front End" (ie: transistor creation) layers, from the "Back End" (Via's, Contacts, and Metal) layers. It's almost like having to build a hard wall between front end and back end, isolating the copper tools, boxes, bunny suits etc., from the front end equipment. If any Cu contamination gets into the front end, the result is usually dead die.

SemiconEng