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To: Scumbria who wrote (108454)8/26/2000 12:35:56 PM
From: semiconeng  Read Replies (1) | Respond to of 186894
 
IBM has been using local interconnect for years, with great success. It allows substantial savings in SRAM array and standard cell area.

My company also uses local interconnect. ;^))

Scumbria


Right, IBM introduced it into manufacturing in 1988. They ought to be able to get it right with 12 years of work:

research.ibm.com
"Planar BEOL technology has been used in IBM DRAM, bipolar, and CMOS logic programs since its introduction into manufacturing in 1988.

HOWEVER:

The tight metal pitches needed on multiple wiring levels require near-vertical, zero-overlap via studs. An alternative to forming W studs by means of CMP is to make use of reactive ion etchback; however, its use results in an extremely tight manufacturing process window and a process that is prone to yield and reliability defects.

It's great for SRAM, but it's been my experience that it plays hell with the logic circuits. I notice that when you say that your company has been using it for years, you don't say "With great yields".

:-)

SemiconEng



To: Scumbria who wrote (108454)8/26/2000 12:37:36 PM
From: Elmer  Respond to of 186894
 
Re: "My company also uses local interconnect. ;^))"

I'm shocked....

EP