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To: combjelly who wrote (18657)	11/10/2000 6:50:37 PM
From: Bill Jackson	Read Replies (1) \| Respond to of 275872

combjelly. SInce they use transport cassettes, this extra clean room space will allow more wafers to be started, no?? The cassettes allow central production of wafers and allow them to go from place to place without all the intervening places being clean room places. I am not sure why else they would expand this space, if not for production? I am not sure how they run a "production line" for wafers. They can have a large room that is fully clean room specced and has all the processing machines in it and they move them from place to place on open trays etc. Or they can have the machines clean and move the parts in sealed cassettes via airlocks that allow cassettes to enter with no dirt getting in. In addition many machines may be connected with conveyance methods between them that are a clean space to whatever clean room spec is needed. They may have the insides at the highest order clean room and the outside a lower level of clean and rely on the cassettes??. Would someone who knows these details, please describe the scene for us and comment on the clean room expansion at Fab 30? Bill