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To: Michael Ohlendorf who wrote (20883)11/28/2000 4:48:12 PM
From: Dan3Read Replies (1) | Respond to of 275872
 
Re: I thought the from the beginning on installed 248 tools (scanners) supported 0.13m

They do. The IBM, and Motorola/AMD 0.13 process both use 248 nanometer steppers. More interesting is some of the information in the article below that implies that .13 is of little or no benefit unless SOI is used. .13 lithography produces 80 nanometer features in AMD's 9 layer process and 70 nanometer features in Intel's 6 layer process.

Intel may see very little performance gain when it moves from .18 to .13 since it has no near term plan for SOI. The lessons learned from several years of copper production experience taught IBM, AMD, and Motorola that they needed SOI for these smaller feature sizes to be useful in a production environment. It looks like Intel's process technology will continue to be 6 months to a year behind.

The move to SOI on a broad commercial basis derives from IBM's conclusion that the prospects for scaling the performance of bulk CMOS become more difficult as design rules move below 100 nm. For its internal server customers and commercial customers of the Microelectronics Division, SOI provides "an extra knob" that keeps performance on its traditional track
eetimes.com