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To: kinkblot who wrote (27)	1/18/2001 3:28:56 PM
From: John Finley	Respond to of 83

Hi Will Thanks for the links. It certainly is an interesting technology. I'll peruse the links ASAP. JF

To: kinkblot who wrote (27)	6/19/2003 9:55:21 AM
From: kinkblot	Respond to of 83

Industrial Physicist (June/July 03) "Ion implantation in silicon technology" by Leonard Rubin and John Poate of Axcelis aip.org Figure 2 is a dose-energy diagram showing various applications; at top center is "bonded wafer splitting for silicon on insulator." The article contains some errors and omissions, but as stated, the technology was largely developed in the early to mid-60s at HVEC subsidiary Ion Physics Corporation. Much of that work was funded by government contracts.