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To: Tenchusatsu who wrote (126844)2/7/2001 3:20:56 PM
From: milo_morai  Read Replies (1) | Respond to of 186894
 
Tench, I don't belive INTC is using any with 180nm, and the dielectrics INTC is using are 130nm are NOT true Low K by most peoples definitions.

They are more like Medium K with a value of 3.

M.

"Motorola researchers developed the material, which process engineering manager Betsy Weitzman described as an inorganic porous film with a K value between 2.0 and 2.5. The company declined to disclose the exact make-up of the material, beyond saying it was in the same class as similar materials being studied by other researchers. " eoenabled.com