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To: fyodor_ who wrote (28160)2/12/2001 11:49:13 PM
From: THE WATSONYOUTHRead Replies (1) | Respond to of 275872
 
Do you think it would be possible to produce... say... 2000 SOI wafers per week locally at Fab30? (not using a thin box process)

Sure... it is possible given enough room, resources,
and people. But high dose/thick box (approx 4000A) processes
require very long implantation times. This is not the way to go long term.I wouldn't doubt they will need at least 6 implanters and an equal number of anneal furnaces.

THE WATSONYOUTH