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Technology Stocks : KLA-Tencor Corporation (KLAC) -- Ignore unavailable to you. Want to Upgrade?

To: SemiBull who wrote (1583)	3/24/2001 12:50:28 PM
From: Proud_Infidel	Respond to of 1779

KLA-Tencor plans more in-situ metrology, but still see it as 'niche' For years, metrology giant KLA-Tencor Corp. has insisted that in-situ measurement systems--embedded in process tools--was a niche application. KLA-Tencor's CEO said the San Jose company still sees it that way after introducing its first in-situ metrology system for chemical mechanical planarization (CMP) equipment (see March 6 story). But Kenneth Schroeder, chief executive and president of KLA-Tencor, this past week said the company will be rolling out more in-situ systems for integration inside other fab tools in the next four or five months. "We don't see these embedded metrology systems taking over stand alone systems in fabs, but there are applications where they make sense," he said after a presentation before the SEMInvest conference in New York. KLA-Tencor's new Precice in-situ system combines optical inspection and eddy-current techniques to take measurements in CMP processes for multiple steps. -J.R.L.