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Technology Stocks : General Lithography -- Ignore unavailable to you. Want to Upgrade?

To: Jim Oravetz who wrote (1261)	6/15/2001 2:11:09 PM
From: Volsi Mimir	Read Replies (1) \| Respond to of 1305

The ALS has proven to be the ideal vehicle for enabling a process called LIGA, a technology developed in Germany that uses X-ray lithography instead of conventional metal machining to create tiny metal structures with sub-micron precision. The ALS X-rays are exposed to an acrylic sheet, which is bonded to a silicon wafer containing a mask of the LIGA structures. After the X-rays hit the mask, the acrylic is etched in a manner that creates precise molds of micro-alignment structures. Dale Boehme, Director of LIGA Technology for AXSUN, said, "The ALS is a great synchrotron source for performing LIGA X-ray exposures because it provides maximum power radiated at energies ideal for exposing these molds." from Berkeley Labs (I posted whole article here): Message 15950863 LIGA- imm-mainz.de LIGA (1995!) mems.isi.edu LIGA- Scandia daytona.ca.sandia.gov