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To: Paul Engel who wrote (133457)4/28/2001 9:48:41 AM
From: FJB  Read Replies (1) | Respond to of 186894
 
Paul,

Intel will have to make do with the older 193 nM tools - with smaller numerical apertures - for about 4 more months.

That could slow their .13 micron ramp a little - but not a lot.


SVGL said that they had only shipped four of their older 193nm scanners with the 0.63NA in their conference call. I recall from news stories that one went to IBM and another to Samsung, which would leave two for Intel. I know that Nikon had shipped 10 ArF scanners with numerical apertures of 0.60 through July 2000, so probably another bunch of those has shipped in the last nine months possibly with higher numerical apertures. Is Nikon sharing the burden with SVG for critical layers at Intel? This is probably top-secret stuff, so I can understand if you can't comment. Nevertheless, please say something. <G> Does Intel manufacture their photoresists internally, or do they purchase them? The latest news reports say that commercially available resists for 193nm are not quite ready/robust enough for high-volume manufacturing.

Bob