Lambda Physik cuts outlook due to SVG's 193-nm tool delay
siliconstrategies.com
By Mark LaPedus
Semiconductor Business News
(08/02/01 13:50 p.m. EST)
SANTA CLARA, Calif. -- There are more signs that Intel Corp. has possibly postponed, delayed, or even canceled a huge order for 193-nm scanners from ASM Lithography's Silicon Valley Group (SVG) unit after several shipment delays.
Germany's Lambda Physik AG--a supplier of lasers for semiconductor, industrial, and related applications--here today lowered its sales forecast for fiscal 2002, after ASML's SVG unit unexpectedly postponed a large order for Lambda's 193-nm lithography laser systems by more than one year. Based in Gottingen, Lambda specifically blamed ASML's SVG unit for the order delays.
Lambda's 193-nm laser systems are reportedly used in SVG's Micrascan 193 high-numerical aperture (HNA) scanners. SVG's 193-nm scanner--which is primarily being developed for Intel--has not been shipped and is about a year late to the market.
A spokesman for Lambda said that ASML's SVG unit has taken delivery of "some'' of Lambda's 193-nm lithography lasers in the past.
But a follow-on order has apparently been delayed by a significant margin. The spokesman confirmed that AMSL's SVG unit has postponed an order for an additional "15 to 16" 193-nm lithography lasers by more than a year, from fiscal 2002 to 2003. Lambda's 2002 fiscal year starts on Oct. 1.
"It's an order for 15 to 16 units that has been postponed from 2002 to 2003," according to the spokesman in a phone interview.
The spokesman also indicated that ASML's SVG unit could even possibly cancel 193-nm lithography laser order all together. "They could also possibly take early delivery of the order," the spokesman indicated.
But still, the postponed order will impact Lambda, a subsidiary of Coherent Inc. of Santa Clara, Calif. The order delay from AMSL's SVG unit reduces Lambda's backlog from about $79.42 million (90 million euros) to about $66.96 million (74 million euros).
Lambda makes lasers for semiconductor and industrial applications. In the lithography arena, it sells the NovaLine family of lasers for 157-, 193,- and 248-nm scanners.
Lambda claims to be the world's largest supplier of 193-nm lithography laser systems, with 70% market share in this arena. The German company supplies 193-nm lasers to three tool suppliers: ASML, ASML's SVG unit, and Japan's Nikon Corp., according to a spokesman from Lambda.
In fact, some 20% of Lambda's total sales come from ASML of the Netherlands, the spokesman said. The company did not break out its sales from ASML's SVG unit or Nikon.
In any event, SVG's move to postpone Lambda's order raises more questions about Intel's overall commitment for SVG's 193-nm scanners in its production fabs.
At one time, ASML's SVG unit was the clear vendor of choice for 193-nm tools at Intel. In late 1999, SVG received a $100 million order for its Micrascan 193 products from a large "microprocessor vendor," of which sources said was Intel.
Originally, Intel was supposed to insert those tools in order process wafers at the company's 130-nm (0.13-micron) node. But SVG is still unable to deliver the systems after several delays, forcing Intel to extend its existing 248-nm tools from SVG and Nikon Corp. via a reduce enhanced technology called phase shift.
In fact, SVG's Micrascan 193 system is a year late to the market. The system was supposed to be shipped late last year, but now the scanner will not be delivered to Intel until October--that is, if ASML's SVG unit does not experience any other delays.
Intel officials insist the tool delays have no bearing on its ability to ramp up its 0.13-micron technology. This week, in fact, Intel rolled out its first chip products based on the 130-nm technology, including a line of processors and chip sets for mobile applications.
"Intel had to push the photomasks [via phase-shift technologies] at 248-nm," said Eric Ross, senior research analyst with Thomas Weisel Partners of New York. But "the yields are pretty good" for Intel's 0.13-micron technology, Ross said.
Meanwhile, Intel hopes to use 193-nm tools in order to process critical device layers at the 100-nm (0.10-micron) node. Intel's 100-nm process--dubbed P862 (200-mm wafers) or P1262 (300-mm wafers) by the company--is due out in 2003.
Earlier this week, an Intel manager told SBN that the company was no longer counting on the Micrascan 193 systems, and it was now opening up the competition for 193-nm exposure tools. The disclosure implied that Intel either postponed or scrapped SVG's original $100 million order (see July 31 story ).
Responding to a story posted Tuesday by SBN, an Intel spokesman claimed the company still has the order on its books, but he could not say whether or not the chip giant would deploy SVG's delayed 193-nm step-and-scan systems in production fabs (see Aug. 1 story ).
Intel refused requests for additional interviews with managers to clarify the matter. The spokesman could only say that it was uncertain what Intel would do with SVG tools, once they are delivered.
The Lambda spokesman believes that Intel is still interested in the 193-nm tools from SVG. "That depends if [SVG] can fix their problems," the spokesman said.
But still, Intel appears to be in the damage control mode--at a time when the clock is ticking for the chip giant and its tool maker, said Risto Puhakka, who tracks the chip-equipment market for VLSI Research Inc. of San Jose.
"Intel could be back peddling here," Puhakka said. But the real key issue is that SVG's shipment delays "opens the door for competitive vendors at Intel," Puhakka said.
"If SVG cannot deliver a credible 300-mm tool to Intel, the business could go to ASML, Nikon, or Canon," Puhakka said.
Ironically, some analysts said Intel's 193-nm tool order could end up being filled by ASML's own machine, which had been in competition with SVG Lithography prior to the acquisition.
Intel's total lithography business--including low- to high-end exposure systems--could be worth an estimated $250-to-$500 million over the next several years, based on estimates from Ross of Thomas Weisel Partners.
"Intel will evaluate [SVG's 193-nm] technology," Ross said. "My feeling is that SVG will fall by the wayside at Intel a little bit," he said.
"The 193-nm tool business [at Intel] may end up going to ASML--not SVG," Ross said. "ASML appears to be the leader in [0.13-micron tool technology], but Nikon also has a chance too," added the analyst. |
