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To: Elmer who wrote (145912)10/23/2001 2:19:30 PM
From: fingolfen  Read Replies (1) | Respond to of 186894
 
What do you expect for gate oxides for .13u?

According to Intel's press release about 300mm: intel.com

"Intel uses the smallest transistor gate in production and the thinnest of thin films to make these ultra speedy transistors. Intel's transistor gate measures just 70 nanometers (0.07 microns in length). Intel's advanced 0.13 micron process technology also features a 1.5 nanometer gate oxide that is the thinnest in the industry for a manufacturing technology and provides industry-leading transistor performance at lower operating voltage."

What isn't clear to me is whether that 15A gate oxide number is the physical or electrical thickness. Either way it's pretty thin. You don't have too many more process iterations before you are left with two choices: 1) No longer scale the gate oxide thickness, or 2) Move to and integrate a higher-dielectric constant film.