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To: Elmer who wrote (147019)11/6/2001 11:00:47 PM
From: semiconeng  Respond to of 186894
 
What's to stop AMD (or Intel) from phase shifting when 193nm steppers are available?

[edit] I see you already answered this question.

EP


Right.... I'm not saying it can't be done on 193nm, I just haven't heard of it being done.... Tweaking of the 193nm Steppers MIGHT be enough in itself to achieve smaller gates. If they can SOMEDAY get 193nm working.

Considering the current state of 193nm Lithography, I'd say that developing 193nm Phase Shifting is down a ways on the priority list.... I doubt it will be ready for AMD's SOI Process. The Steppers themselves might not yet be available by then. I don't think AMD will wait.....

Semi