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To: Philip W. Dunton, Jr who wrote (3515)	12/6/2001 7:35:11 PM
From: SemiBull	Read Replies (1) \| Respond to of 3661

Mattson Ships New Advance Low-K Resist & Residue Removal System biz.yahoo.com U.S Semiconductor Manufacturer of Integrated Communication Devices Receives Shipment of New Advance Low-K Resist & Residue Removal System Sale of Mattson's Aspen III Highlands Confirms Mattson's Advantage Over Comparable Capable Equipment FREMONT, Calif.--(BUSINESS WIRE)--December 6, 2001-- Mattson Technology (Nasdaq:MTSN - news), a leading supplier of advanced process equipment used to manufacture semiconductors, today announced it has begun installing its next generation Low-K resist and residue removal equipment at a U.S semiconductor facility. Highlands, 200mm/300mm capable product was selected for (BEOL) integration of resist and residue removal of porous and non-porous Low-K films of 0.1um and below dual damascene structures. Selection was based on advance process capability coupled with high productivity platform. Development capabilities will eventually be transferred to other alliance partners, which may also include foundries. Michael Santiago, Plasma Division Product Marketing Manager, commented that this installation is significant because this customer is one of the leading-edge companies, which is aggressively integrating Low-K films. This installation demonstrates their confidence in our new product to meet their aggressive program goals. We look forward to strengthening our relationship with them. About Mattson Technology Mattson Technology Inc. is a leading supplier of thermal, plasma and wet semiconductor processing equipment. The company's products combine advanced process technology on high-productivity platforms backed by industry-leading support. Since beginning operations in 1989, the company's core vision has been to help bring technology leadership and productivity gains to semiconductor manufacturers worldwide. Headquartered in Fremont, Calif., the company maintains sales and support centers throughout the United States, Europe, Asia/Pacific and Japan. For more information, please contact Mattson Technology Inc., 2800 Bayview Drive, Fremont, Calif. 94538. Telephone: (800) MATTSON / (510) 657-5900. Fax: (510) 657-0165. Internet: www.mattson.com. -------------------------------------------------------------------------------- Contact: Mattson Technology Inc. Lauren Vu, 510/492-6518 fax 510/492-6460 lauren.vu@mattson.com