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To: Paul Engel who wrote (152676)12/17/2001 1:30:19 PM
From: Tony Viola  Read Replies (3) | Respond to of 186894
 
Paul, don't know if this presentation by Robert Gasser, Jr., Intel, about process development, yields, copy exactly, etc., has been posted here yet. Looks promising to me, albeit I have limited experience in this area, for 0.13, 300 mm.

intel.com

Tony