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To: semiconeng who wrote (153027)12/22/2001 1:08:50 PM
From: Paul Engel  Read Replies (1) | Respond to of 186894
 
Semi - Wasn't Canon the first company to supply a 300 MM Step & Scanner?

I recall Intel paid for one and had it installed at Sematech for everyone's use - then after that program ended, Intel had the machine shipped to it for its own use.

Paul



To: semiconeng who wrote (153027)12/22/2001 1:20:57 PM
From: Elmer  Read Replies (1) | Respond to of 186894
 
No matter what, it seems like whatever bugs were affecting the 193nm Steppers across most manufacturers has been solved, and the industry can now move forward. Good news all around.

Didn't Intel say in their technology CC last week that they wouldn't be using 193nm steppers until the 90nm process? Do you think this could change with the availability of this new equipment? How would it affect .13u performance?

EP


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