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To: StanX Long who wrote (60992)	2/27/2002 1:59:09 AM
From: StanX Long	Read Replies (1) \| Respond to of 70976

TEL says it won appeal in Tegal suit over etch patent Semiconductor Business News (02/26/02 15:51 p.m. EST) siliconstrategies.com TOKYO--Tokyo Electron Ltd. today announced it has won an appeal in a U.S. patent lawsuit filed by Tegal Corp., and it is now able to continue selling its A-IEM oxide etchers in the United States "without fear of any further interference by Tegal." Tokyo-based TEL said the U.S. Court of Appeals upheld a trial court's ruling in August 2000, which concluded the company had not violated Tegal's patent for dual-frequency etch technology in the advanced IEM etchers. Consequentially, TEL said, the A-IEM oxide etcher model 65DI and 85DI can be marketed and used by chip makers without interference from Tegal. Tegal in Petaluma, Calif., had not yet responded to the claim early today. Tegal filed its original patent lawsuit against TEL and its U.S. subsidiary nearly four years ago, and it had won an injunction in the civil cases in 1999.