SI
SI
discoversearch

We've detected that you're using an ad content blocking browser plug-in or feature. Ads provide a critical source of revenue to the continued operation of Silicon Investor.  We ask that you disable ad blocking while on Silicon Investor in the best interests of our community.  If you are not using an ad blocker but are still receiving this message, make sure your browser's tracking protection is set to the 'standard' level.
Technology Stocks : Applied Materials No-Politics Thread (AMAT) -- Ignore unavailable to you. Want to Upgrade?


To: Math Junkie who wrote (767)3/8/2002 7:36:18 PM
From: Proud_Infidel  Respond to of 25522
 
Canon & Applied's EPIC fab
This could be a story of epic proportions for Canon Inc.. Some sources believe that the Japanese company has won a lithography tool order at Applied Materials Inc.

Under the terms of the deal, Canon has reportedly shipped one of its 248-nm tools to Applied's prototyping and demonstration fab, called the Equipment and Process Integration Center (EPIC). The R&D fab develops process technologies for Applied's modules and demos the capabilities to chip equipment customers.

Canon reportedly shipped its FPA-5000ES3 tools to the Santa Clara, Calif.-based company. Applied or Canon have not officially announced the deal.

But at the SPIE Microlithography conference in Santa Clara this week, Canon dropped hints that it was working with Applied's EPIC operation in a big way.

Hong Du, senior manager of photolithography at EPIC, was a guest speaker at a dinner hosted by Canon at SPIE. Du did not announce the order, but noted that Applied has been able to demonstrate 0.10-micron circuits using Canon's 248-nm tool.

Applied developed 0.10-micron interconnects with "no tricks," Ho said, referring to the fact that it is not using phase-shifting photomasks or other "tricks" with the tool in order to accomplish the feat.

The EPIC fab also uses other lithography tools as well. For some time, the operation has beenusing a tool from ASML Holding N.V.--M.L.